Anodic-aluminum-oxide templated carbon nanotubes in the field emission triode

Chen Chun Lin*, Kai Chun Chang, Fu-Ming Pan, Cheng Tzu Kuo, Mei Liu, Chi Neng Mo

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


To fabricate the field-emission triode structure, carbon nanotubes (CNT) were used as field emitters and grown in the anodic aluminum oxide (AAO). AAO thin layer with vertical pore channels was first prepared on the Si (100) substrate and was used to template the following growth of CNTs in an electron cyclotron resonance chemical vapor deposition (ECRCVD) system. The tetraethoxysilane (TEOS) oxide and Al layer were deposited on the CNTs and acted as the dielectric layer and gate electrode layers for the triode structure, respectively. Reactive ion and wet etches were then used to open the fieldemission area in the triode. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on field of8.05 V/μm was measured.

Original languageEnglish
Pages (from-to)590-592
Number of pages3
JournalDigest of Technical Papers - SID International Symposium
Issue number1
StatePublished - 1 Jan 2007
Event2007 SID International Symposium - Long Beach, CA, United States
Duration: 23 May 200725 May 2007

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