To fabricate the field-emission triode structure, carbon nanotubes (CNT) were used as field emitters and grown in the anodic aluminum oxide (AAO). AAO thin layer with vertical pore channels was first prepared on the Si (100) substrate and was used to template the following growth of CNTs in an electron cyclotron resonance chemical vapor deposition (ECRCVD) system. The tetraethoxysilane (TEOS) oxide and Al layer were deposited on the CNTs and acted as the dielectric layer and gate electrode layers for the triode structure, respectively. Reactive ion and wet etches were then used to open the fieldemission area in the triode. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on field of8.05 V/μm was measured.
|Number of pages||3|
|Journal||Digest of Technical Papers - SID International Symposium|
|State||Published - 1 Jan 2007|
|Event||2007 SID International Symposium - Long Beach, CA, United States|
Duration: 23 May 2007 → 25 May 2007