Anodic aluminum oxide template assisted growth of vertically aligned carbon nanotube arrays by ECR-CVD

Po Lin Chen, Jun Kai Chang, Cheng Tzu Kuo*, Fu-Ming Pan

*Corresponding author for this work

Research output: Contribution to journalConference article

17 Scopus citations


Highly aligned carbon nanotubes (CNTs) have been successfully grown in vertical channels of the anodic aluminum oxide (AAO) template by microwave plasma electron cyclotron resonance chemical vapor deposition (ECR-CVD). Nanoporous AAO templates with hexagonal pore pattern were prepared by the two-step anodization of Al films. Following the electroplating of Co catalyst into the pore bottom, multiwalled CNTs were synthesized in the ECR-CVD system using a gas mixture of CH4 and H2. The microstructure of the CNTs was studied by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The CNTs with a very high packing density and a uniform size distribution are well graphitized, and Co particles embedded at their tips implies the tip growth mechanism. The segments of CNTs stretching out of the AAO nanopores still maintain relatively good alignment, and have a very slow growth rate, which allows us to obtain reproducible tube length by tuning the growth time. Field emission measurements of the CNTs showed derivable electron emission properties, attributed to their uniformity in size, good alignment, and good graphitization properties.

Original languageEnglish
Pages (from-to)1949-1953
Number of pages5
JournalDiamond and Related Materials
Issue number11-12
StatePublished - 1 Nov 2004
EventProceedings of the 9th International Conference on New Diamond - Tokyo, Japan
Duration: 26 Mar 200429 Mar 2004


  • Field emission
  • Graphite
  • Nanotubes
  • Plasma CVD

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