Angular distribution of the sputtered atoms from TbFeCo targets

Shiuh Chao*, Tzuan Ren Jeng, Vien Shien Lo, Der-Ray Huang, Tsai Chu Hsiao

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

The angular distribution of the sputtered Tb, Fe, and Co atoms from the elemental targets could be described by cosn θ distribution with n=1.90, 0.54, and 1.01 for Tb, Fe, and Co, respectively. For TbFeCo composite targets with mixed elemental and intermetallic compound phases, the overall angular distribution of the sputtered Tb, Fe, and Co atoms from the mixed phases could also be described by the cosn θ distribution function, and the values of the n's were related to the volume percentage of the intermetallic compound content in the composite target. This was not true of the Tb distribution for a target containing high intermetallic compound content. In that sample, an off-normal term has to be added to the cos n θ distribution function. It was found that a composite target with about 23 vol % intermetallic compound would produce a uniform composition distribution of TbFeCo film on the substrate.

Original languageEnglish
Pages (from-to)5354-5359
Number of pages6
JournalJournal of Applied Physics
Volume74
Issue number9
DOIs
StatePublished - 1 Dec 1993

Fingerprint Dive into the research topics of 'Angular distribution of the sputtered atoms from TbFeCo targets'. Together they form a unique fingerprint.

Cite this