Analysis of irregular increase in sheet resistance of Ni silicides on transition from NiSi to NiSi2

Kazuo Tsutsui*, Ruifei Xiang, Koji Nagahiro, Takashi Shiozawa, Parhat Ahmet, Yasutoshi Okuno, Michikazu Matsumoto, Masafumi Kubota, Kuniyuki Kakushima, Hiroshi Iwai

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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