An on-chip, electricity-free and single-layer pressure sensor for microfluidic applications

Chia-Hung Tsai, Toshiki Nakamura, Makoto Kaneko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

A novel method for sensing local pressure inside a microfluidic device is proposed and developed. The main advantage of the method is that the pressure can be visually seen without attaching any electrical wire or instrument. The method can also be easily integrated into applications, such as micro-robots, because of its single-layer design. The working principle is based on the deformation of Polydimethylsiloxane, a kind of polymer that is often used in microfluidic systems. The deformation in the deformation chamber causes fluid to flow in, or out, the sensing area, and consequently results in changes of color intensity in the area. As a result, the pressure can be determined based on the brightness value over the sensing area. Experimental results show a highly correlated relationship between the measured brightness and pressure with the absolute correlation of 0.986. The hysteresis and drift of the proposed sensor are investigated, and are compared with our previously proposed microbeads approach. The prototype of the proposed sensor succeeded in performing measurement on local pressure in a microfluidic device with the resolution of 3.04 kPa.

Original languageEnglish
Title of host publicationIROS Hamburg 2015 - Conference Digest
Subtitle of host publicationIEEE/RSJ International Conference on Intelligent Robots and Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages165-170
Number of pages6
ISBN (Electronic)9781479999941
DOIs
StatePublished - 11 Dec 2015
EventIEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2015 - Hamburg, Germany
Duration: 28 Sep 20152 Oct 2015

Publication series

NameIEEE International Conference on Intelligent Robots and Systems
Volume2015-December
ISSN (Print)2153-0858
ISSN (Electronic)2153-0866

Conference

ConferenceIEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2015
CountryGermany
CityHamburg
Period28/09/152/10/15

Keywords

  • Color
  • Microchannels
  • Pressure measurement
  • Pressure sensors
  • Robot sensing systems
  • Semiconductor device measurement

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    Tsai, C-H., Nakamura, T., & Kaneko, M. (2015). An on-chip, electricity-free and single-layer pressure sensor for microfluidic applications. In IROS Hamburg 2015 - Conference Digest: IEEE/RSJ International Conference on Intelligent Robots and Systems (pp. 165-170). [7353369] (IEEE International Conference on Intelligent Robots and Systems; Vol. 2015-December). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IROS.2015.7353369