An Electro-Thermal Model for Metal-Oxide-Metal Antifuses

Guobiao Zhang, Chen-Ming Hu, Peter Y. Yu, Steve Chiang, Shafy Eltoukhy, Esmat Z. Hamdy

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

In this paper, a complete electro-thermal analysis is presented for the metal-oxide-metal antifuses. The application of the Wiedemann-Franz Law and the thin film effect on thermal and electrical conductivities of metal films were also discussed. Several key parameters for tungsten-oxide-tungsten antifuse were extracted. The reaction temperature between tungsten and oxide was estimated to be around 1300°C. The core resistivity was found to be around 250 μω -cm. This model can be readily extended to the other metal-dielectric-metal systems.

Original languageEnglish
Pages (from-to)1548-1558
Number of pages11
JournalIEEE Transactions on Electron Devices
Volume42
Issue number8
DOIs
StatePublished - 1 Jan 1995

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