An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm

Shih Wei Yang, Chern Sheng Lin*, Shir-Kuan Lin, Shu Hsien Fu, Mau Shiun Yeh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Purpose - The purpose of this paper is to propose an automatic optical inspection system for measuring the surface profile of a microlens array. Design/methodology/approach - The system set-up was constructed according to the principle of the Fizeau interferometer. After capturing the ring interference fringe images of the microlens with a camera, the diameter, profile information and optical properties were analyzed through a microlens surface profile algorithm using innovative image pre-processing with a precision of less than 0.09 micron. Findings - By integrating with the genetic algorithm, the XY-Table shortest moving path of the system is calculated to achieve the purpose of high-speed inspection and automatic microlens array surface profile measurement. Originality/value - The measurement results of this system were also compared with other systems, including the atomic force microscope and stylus profiler, to verify the measurement precision and accuracy of this system.

Original languageEnglish
Article number17077310
Pages (from-to)57-67
Number of pages11
JournalAssembly Automation
Volume33
Issue number1
DOIs
StatePublished - 1 Mar 2013

Keywords

  • Automatic optical inspection system
  • Automation
  • Genetic algorithms
  • Inspection
  • Microlens array
  • Surface profile
  • Surface properties of materials

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