A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.
|Number of pages||5|
|State||Published - 1 Dec 2002|
|Event||Proceedings of The 2002 International Conference on Microelectronic Test Structures - Cork, Ireland|
Duration: 8 Apr 2002 → 11 Apr 2002
|Conference||Proceedings of The 2002 International Conference on Microelectronic Test Structures|
|Period||8/04/02 → 11/04/02|