An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run

Kelvin Yih Yuh Doong*, Sunnys Hsieh, S. C. Lin, L. J. Hung, Robin J. Wang, Binson Shen, J. W. Hisa, Jyh-Chyurn Guo, I. C. Chen, K. L. Young, Charles Ching Hsiang Hsu

*Corresponding author for this work

Research output: Contribution to conferencePaper

2 Scopus citations

Abstract

A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.

Original languageEnglish
Pages55-59
Number of pages5
DOIs
StatePublished - 1 Dec 2002
EventProceedings of The 2002 International Conference on Microelectronic Test Structures - Cork, Ireland
Duration: 8 Apr 200211 Apr 2002

Conference

ConferenceProceedings of The 2002 International Conference on Microelectronic Test Structures
CountryIreland
CityCork
Period8/04/0211/04/02

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    Doong, K. Y. Y., Hsieh, S., Lin, S. C., Hung, L. J., Wang, R. J., Shen, B., Hisa, J. W., Guo, J-C., Chen, I. C., Young, K. L., & Hsu, C. C. H. (2002). An assessment of Physical and Electrical Design Rule based Statistical Process Monitoring and Modeling (PEDR-SPMM): For foundry manufacturing line of multiple-product mixed-run. 55-59. Paper presented at Proceedings of The 2002 International Conference on Microelectronic Test Structures, Cork, Ireland. https://doi.org/10.1109/ICMTS.2002.1193171