An alternative process for silicon nanowire fabrication with SPL and wet etching system

Kow-Ming Chang*, K. S. You, J. H. Lin, Jeng-Tzong Sheu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Fingerprint Dive into the research topics of 'An alternative process for silicon nanowire fabrication with SPL and wet etching system'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy