An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof

Chih Chung Chen; Yu Min Fu; Hsin Feng Hsu; Yu Ting Cheng

doi:10.1109/TRANSDUCERS.2019.8808620

An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof

Chih Chung Chen, Yu Min Fu, Hsin Feng Hsu, Yu Ting Cheng

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents an alignment scheme for SiOB fabrication using an electromagnetic force-driven microactuator with five degrees of freedom (5 DOF) of movement. The actuator comprising four sets of corrugated springs and spiral coils driven by Lorentz and reluctant force respectively can accomplish linearly horizontal and vertical displacement and tilt angle ranging within 2 and 10.5μm, and 0.1° for positioning optical lens with a resolution of 0.1μm, which has been experimentally validated to facilitate the scheme feasibly.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1572-1575
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808620
State	Published - Jun 2019
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country	Germany
City	Berlin
Period	23/06/19 → 27/06/19

Keywords

Alignment Scheme
Electromagnetic Microactuators
High Precision
Low Cost
Optical Communication
SiOB

Access to Document

10.1109/TRANSDUCERS.2019.8808620

Link to publication in Scopus

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Chen, C. C., Fu, Y. M., Hsu, H. F., & Cheng, Y. T. (2019). An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1572-1575). [8808620] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808620

Chen, Chih Chung ; Fu, Yu Min ; Hsu, Hsin Feng ; Cheng, Yu Ting. / An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 1572-1575 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

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title = "An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof",

abstract = "This paper presents an alignment scheme for SiOB fabrication using an electromagnetic force-driven microactuator with five degrees of freedom (5 DOF) of movement. The actuator comprising four sets of corrugated springs and spiral coils driven by Lorentz and reluctant force respectively can accomplish linearly horizontal and vertical displacement and tilt angle ranging within 2 and 10.5μm, and 0.1° for positioning optical lens with a resolution of 0.1μm, which has been experimentally validated to facilitate the scheme feasibly.",

keywords = "Alignment Scheme, Electromagnetic Microactuators, High Precision, Low Cost, Optical Communication, SiOB",

author = "Chen, {Chih Chung} and Fu, {Yu Min} and Hsu, {Hsin Feng} and Cheng, {Yu Ting}",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808620",

language = "English",

series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

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booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

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Chen, CC, Fu, YM, Hsu, HF & Cheng, YT 2019, An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808620, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 1572-1575, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808620

An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof. / Chen, Chih Chung; Fu, Yu Min; Hsu, Hsin Feng; Cheng, Yu Ting.

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 1572-1575 8808620 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof

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AU - Hsu, Hsin Feng

AU - Cheng, Yu Ting

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N2 - This paper presents an alignment scheme for SiOB fabrication using an electromagnetic force-driven microactuator with five degrees of freedom (5 DOF) of movement. The actuator comprising four sets of corrugated springs and spiral coils driven by Lorentz and reluctant force respectively can accomplish linearly horizontal and vertical displacement and tilt angle ranging within 2 and 10.5μm, and 0.1° for positioning optical lens with a resolution of 0.1μm, which has been experimentally validated to facilitate the scheme feasibly.

AB - This paper presents an alignment scheme for SiOB fabrication using an electromagnetic force-driven microactuator with five degrees of freedom (5 DOF) of movement. The actuator comprising four sets of corrugated springs and spiral coils driven by Lorentz and reluctant force respectively can accomplish linearly horizontal and vertical displacement and tilt angle ranging within 2 and 10.5μm, and 0.1° for positioning optical lens with a resolution of 0.1μm, which has been experimentally validated to facilitate the scheme feasibly.

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KW - Electromagnetic Microactuators

KW - High Precision

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KW - Optical Communication

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Chen CC, Fu YM, Hsu HF, Cheng YT. An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 1572-1575. 8808620. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). https://doi.org/10.1109/TRANSDUCERS.2019.8808620