An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof

Chih Chung Chen, Yu Min Fu, Hsin Feng Hsu, Yu Ting Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents an alignment scheme for SiOB fabrication using an electromagnetic force-driven microactuator with five degrees of freedom (5 DOF) of movement. The actuator comprising four sets of corrugated springs and spiral coils driven by Lorentz and reluctant force respectively can accomplish linearly horizontal and vertical displacement and tilt angle ranging within 2 and 10.5μm, and 0.1° for positioning optical lens with a resolution of 0.1μm, which has been experimentally validated to facilitate the scheme feasibly.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1572-1575
Number of pages4
ISBN (Electronic)9781728120072
DOIs
StatePublished - Jun 2019
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 23 Jun 201927 Jun 2019

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period23/06/1927/06/19

Keywords

  • Alignment Scheme
  • Electromagnetic Microactuators
  • High Precision
  • Low Cost
  • Optical Communication
  • SiOB

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  • Cite this

    Chen, C. C., Fu, Y. M., Hsu, H. F., & Cheng, Y. T. (2019). An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1572-1575). [8808620] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808620