@inproceedings{c78deb6fc2fa4bcc9aed4281d87abb81,
title = "An Alignment Scheme for Low Cost and High Precision Siob Fabrication Using an Electromagnetic Microactuator with 5 Dof",
abstract = "This paper presents an alignment scheme for SiOB fabrication using an electromagnetic force-driven microactuator with five degrees of freedom (5 DOF) of movement. The actuator comprising four sets of corrugated springs and spiral coils driven by Lorentz and reluctant force respectively can accomplish linearly horizontal and vertical displacement and tilt angle ranging within 2 and 10.5μm, and 0.1° for positioning optical lens with a resolution of 0.1μm, which has been experimentally validated to facilitate the scheme feasibly.",
keywords = "Alignment Scheme, Electromagnetic Microactuators, High Precision, Low Cost, Optical Communication, SiOB",
author = "Chen, {Chih Chung} and Fu, {Yu Min} and Hsu, {Hsin Feng} and Cheng, {Yu Ting}",
year = "2019",
month = jun,
doi = "10.1109/TRANSDUCERS.2019.8808620",
language = "English",
series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1572--1575",
booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
address = "United States",
note = "null ; Conference date: 23-06-2019 Through 27-06-2019",
}