@inproceedings{4c35fbf05f5c4f00925ab20c5f581c0e,
title = "An accurate {"}decoupled C-V{"} method for characterizing channel and overlap capacitances of miniaturized MOSFET",
abstract = "A novel {"}decoupled C-V {"} technique is proposed to characterize the channel and overlap capacitances of miniaturized MOSFET's. This method successfully DECOUPLES channel capacitance from overlap capacitance in submicron CMOS devices. The intrinsic channel capacitance can be well modeled by the quasi-static C-V theory. It allows the accurate determination of the effective channel length and effective channel doping concentration in submicron channel region. The bias dependence of the extrinsic overlap capacitance is observed to be channel-doping-concentration dependent.",
author = "Jyh-Chyurn Guo and Hsu, {C. C.H.} and Lin, {Pole Shang} and Chung, {Steve S.}",
year = "1993",
month = jan,
day = "1",
doi = "10.1109/VTSA.1993.263594",
language = "English",
series = "International Symposium on VLSI Technology, Systems, and Applications, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "256--260",
booktitle = "1993 International Symposium on VLSI Technology, Systems, and Applications, VLSI-TSA 1993 - Proceedings of Technical Papers",
address = "United States",
note = "null ; Conference date: 12-05-1993 Through 14-05-1993",
}