An AC Conductance Technique for Measuring Self-Heating in SOI MOSFET's

Robert H. Tu, Clement Wann, Joseph C. King, Ping K. Ko, Chen-Ming Hu

Research output: Contribution to journalArticlepeer-review

59 Scopus citations

Abstract

In this paper, we present a new technique for isolating the electrical behavior of an SOI MOSFET's from the self-heating effect using an ac conductance method. This method reconstructs an I-V curve by integrating high frequency output conductance data. The heating effect is eliminated when the frequency is much higher than the inverse of the thermal time constant of the SOI device. We present measurement results from SOI MOSFET's that demonstrate that heating can indeed be significant in SOI devices.

Original languageEnglish
Pages (from-to)67-69
Number of pages3
JournalIEEE Electron Device Letters
Volume16
Issue number2
DOIs
StatePublished - 1 Jan 1995

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