Aging of ITO anodes treated by supercritical CO2/H2O2 fluids for OLEDs

W. C. Tien, L. Y. Chen, M. J. Chuang, A. K. Chu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


The aging behaviors of indium tin oxide (ITO) anodes treated by supercritical CO2/H2O2 (SCCO2/H2O2) fluids were investigated. As the SCCO2/H2O2-treated ITO anodes were aged, the contact angle and surface energy were analyzed and compared with those of the ITO anodes treated by oxygen plasma. The SCCO2/H2O2 pretreatment yielded a stable polar component of the ITO surfaces after 48 h of aging. The energy reduction in the polar component of the oxygen-plasma-treated ITO due to aging was 20 %, as compared with the 1.1 % decrease in ITO treated with the SCCO2/H2O2 fluids at 4000 psi for 15 min. The X-ray photoelectron spectroscopy analysis revealed that the oxygen content of the ITO surfaces with the SCCO2/H2O2 pretreatment was significantly higher than that of the ITO treated by oxygen plasma. This could result from the formation of hydroxyl products that functioned as a stable buffer layer against further contamination during aging. In addition, the correlated dependence of the OLED performance on the aged ITO anodes was also studied. The OLEDs with the SCCO2/H2O2 pretreatment showed an improved degradation of I–V characteristics and brightness in comparison with those of the devices treated with oxygen plasma after aging the treated ITO anodes for 6 and 12 h. The obtained results suggested that the ITO anodes treated by the SCCO2/H2O2 fluids exhibited a stable surface chemistry and could be useful for OLED applications.

Original languageEnglish
Pages (from-to)9139-9145
Number of pages7
JournalJournal of Materials Science: Materials in Electronics
Issue number11
StatePublished - 1 Nov 2015

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