Advanced confocal microscopy for rapid nanoscale topography of surfaces

Chi Sheng Hsieh, Guan Yu Zhuo, Ming Che Chan*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

An advanced confocal microscope with nanoscale depth resolutions and the capability for rapid capture of 3D surface topography was presented. The proposed microscope shows great promise for optical testing of electronic or photonic elements.

Original languageEnglish
Title of host publicationFreeform Optics - Proceedings Optical Design and Fabrication 2019 (Freeform, OFT)
PublisherOptical Society of America (OSA)
ISBN (Electronic)9781943580606
DOIs
StatePublished - 3 Jun 2019
EventFreeform Optics, Freeform 2019 - Part of Optical Design and Fabrication 2019 - Washington, United States
Duration: 12 Jun 201912 Jun 2019

Publication series

NameFreeform Optics - Proceedings Optical Design and Fabrication 2019 (Freeform, OFT)

Conference

ConferenceFreeform Optics, Freeform 2019 - Part of Optical Design and Fabrication 2019
CountryUnited States
CityWashington
Period12/06/1912/06/19

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