Adsorption and desorption characteristics of semiconductor volatile organic compounds on the thermal swing honeycomb zeolite concentrator

Feng Tang Chang, Yu Chih Lin, Hsun-Ling Bai*, Bau Shei Pei

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

The use of a honeycomb zeolite concentrator and an oxidation process is one of the most popular methods demonstrated to control volatile organic compound (VOCs) emissions from waste gases in semiconductor manufacturing plants. This study attempts to characterize the performance of a concentrator in terms of the removal efficiencies of semiconductor VOCs (isopropyl alcohol [IPA], acetone, propylene glycol methyl ether [PGME], and propylene glycol monomethyl ether acetate [PGMEA]) under several parameters that govern the actual operations. Experimental results indicated that at inlet temperatures of under 40 °C and a relative humidity of under 80%, the removal efficiency of a zeolite concentrator can be maintained well over 90%. The optimal rotation speed of the concentrator is between 3 and 4.5 rph in this study. The optimal rotation speed increases with the VOCs inlet concentration. Furthermore, reducing the concentration ratio helps to increase the removal efficiency, but it also increases the incineration cost. With reference to competitive adsorption, PGMEA and PGME are more easily adsorbed on a zeolite concentrator than are IPA and acetone because of their high boiling points and molecular weights.

Original languageEnglish
Pages (from-to)1384-1390
Number of pages7
JournalJournal of the Air and Waste Management Association
Volume53
Issue number11
DOIs
StatePublished - 1 Jan 2003

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