Activation mechanism of implanted boron in a Si substrate

M. H. Juang*, Huang-Chung Cheng

*Corresponding author for this work

Research output: Contribution to journalArticle

5 Scopus citations


The recrystallization and dopant activation in the BF2 + implanted samples with a 110 keV/5×1015 cm -2 condition into a Si substrate and annealed with different heating rates to various preset temperatures for zero holding time have been studied. A higher heating rate yielded a higher carrier mobility and a better crystallinity. A statistical model was proposed to characterize the dopant activation. The activated dopant concentration n was expressed as γ exp(-Ea/kT). The pre-exponential term γ is a function of critical temperature Tc, due to a finite melting point of Si, and heating rate. Both the effective activation energy Ea and T c values decreased with increasing heating rate. With increasing heating rate, the γ term rapidly decreased at low rates due to the shortened effective annealing time, but showed slight increase at high rates due to the decreased Tc value. Low heating rates facilitated the dopant activation via the γ term, while high heating rates enhanced the activation efficiency via the Ea term.

Original languageEnglish
Pages (from-to)5190-5194
Number of pages5
JournalJournal of Applied Physics
Issue number11
StatePublished - 1 Dec 1992

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