A web services-based collaborative planning, forecasting, and replenishment (cpfr) framework for managing spare parts of semiconductor equipment

Mu-Chen Chen*, Kai Ying Chen, Ming Fu Hsu, Cheng Ta Yeh

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

In a semiconductor foundry, equipment failure has long been recognized as a major cause of unpredicted breakdown which results in an excessive production loss. Equipment maintenance management is one of the essential tasks in semiconductor manufacturing. Due to the prosperity of Internet and IT, e-diagnostics and e-maintenance through the web have become important applications in the semiconductor industry. Web services (WSs) can assist the data integration in heterogeneous e-manufacturing systems to support faster and remote maintenance functions. In this paper, a WS-based collaborative planning, forecasting and replenishment (CPFR) framework, namely WS-CPFR, is developed to collaboratively manage the logistics activities of spare parts in semiconductor equipment between equipment suppliers and semiconductor factories.

Original languageAmerican English
Article number5170099
Pages (from-to)596-600
Number of pages5
JournalIEEE Transactions on Semiconductor Manufacturing
Volume22
Issue number4
DOIs
StatePublished - 1 Nov 2009

Keywords

  • Collaborative planning, forecasting and replenishment (CPFR)
  • E-diagnostics
  • E-maintenance
  • E-manufacturing
  • Semiconductor industry
  • Spare parts
  • Web services

Fingerprint Dive into the research topics of 'A web services-based collaborative planning, forecasting, and replenishment (cpfr) framework for managing spare parts of semiconductor equipment'. Together they form a unique fingerprint.

Cite this