A web Services based collaborative management framework for semiconductor equipment

Mu Chen Chen*, Kai Ying Chen, Ming Fu Hsu, Cheng Tah Yeh

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Web Services have afforded inter-enterprise information technologies to integrate heterogeneous systems in the e-manufacturing environment along the supply chain. In a semiconductor foundry, the equipment failure has long been recognized as a major source of unpredicted production process breakdown and excessive production loss. Equipment maintenance management is one of the important tasks in semiconductor manufacturing. Due to the prosperity of Internet and information technologies,e-diagnostics and e-maintenance through Internet have been considered as important applications in industry. Web Services can assist the data integration in heterogeneous e-manufacturing systems to support faster and remote maintenance functions. In this paper, a Web Service s based Collaborative Planning, Forecasting and Replenishment (CPFR) platform, namely WS-CPFR, is developed to collaboratively manage spare parts in semiconductor equipment between equipment suppliers and semiconductor factories. The global application involving multi-factory and multi-supplier of this WS -CPFR platform can be easily achieved with Web Services technology.

Original languageEnglish
Title of host publication2006 IEEE International Conference on Systems, Man and Cybernetics
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages3784-3789
Number of pages6
ISBN (Print)1424401003, 9781424401000
DOIs
StatePublished - 1 Jan 2006
Event2006 IEEE International Conference on Systems, Man and Cybernetics - Taipei, Taiwan
Duration: 8 Oct 200611 Oct 2006

Publication series

NameConference Proceedings - IEEE International Conference on Systems, Man and Cybernetics
Volume5
ISSN (Print)1062-922X

Conference

Conference2006 IEEE International Conference on Systems, Man and Cybernetics
CountryTaiwan
CityTaipei
Period8/10/0611/10/06

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