A unified mobility model for excimer laser annealed complementary thin film transistors simulation

Hsiao Yi Lin*, Yi-Ming Li, Jam Wem Lee, Chaung Ming Chiu, S. M. Sze

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

In this paper, a unified SPICE mobility model for excimer leaser annealed lower temperature polycrystalline silicon (LPTS) complementary thin film transistors (TFTs) is proposed. In comparing with the conventional RPI model, the proposed mobility model exhibits very good property in representing the vertical electrical field induced mobility degradation. Our model improves the correctness of the circuit simulation without increasing any complexity and having no any convergence issue. Comparisons among the conventional RPI TFT mobility model, and measurement data, this new mobility model demonstrated very good accuracy in the simulation of laser annealed LTPS TFTs. This TFT model is very useful in precisely modeling the circuit characteristics for the complementary system on panel (SOP) circuit.

Original languageEnglish
Title of host publication2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
EditorsM. Laudon, B. Romanowicz
Pages13-16
Number of pages4
StatePublished - Jan 2004
Event2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 - Boston, MA, United States
Duration: 7 Mar 200411 Mar 2004

Publication series

Name2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
Volume2

Conference

Conference2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
CountryUnited States
CityBoston, MA
Period7/03/0411/03/04

Keywords

  • Complementary TFT mode
  • Excimer laser annealed
  • Gate induced mobility degradation
  • LTPS
  • SPICE mobility model

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    Lin, H. Y., Li, Y-M., Lee, J. W., Chiu, C. M., & Sze, S. M. (2004). A unified mobility model for excimer laser annealed complementary thin film transistors simulation. In M. Laudon, & B. Romanowicz (Eds.), 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 (pp. 13-16). (2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004; Vol. 2).