A tilting micromirror with well-controlled digital angle through constrained lever structure

Jin-Chern Chiou*, C. F. Kuo, Y. C. Lin

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

In this paper, a tilting micromirror device that can achieve designed angle is proposed. A lever structure, driven by electrostatic actuators, was used to enlarge tilting angle. To obtain precise deflecting angle, the lever structure is constrained by the substrate. By applying a voltage, the electrostatic actuators drive the lever down to the substrate such that the micromirror device on the opposite side of the lever structure could be lifted. PolyMUMPs process was used to fabricate proposed micromirror devices. The actuators are simulated to investigate characteristics of the micromirror devices. Experimental results had indicated that the micromirror device could reach 10-degree tilting angle with 80V driving signal with 6.4% relative error compared to designed model.

Original languageEnglish
Pages (from-to)159-165
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5455
DOIs
StatePublished - 2 Dec 2004
EventMEM, MOEMS, and Micromachining - Strasbourg, France
Duration: 29 Apr 200430 Apr 2004

Keywords

  • Lever
  • Micro-mirror
  • PolyMUMPs

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