A theory for anomalous spectral behaviors observed in proton-enhanced microstrip inductors on silicon with its brief derivation

Chungpin Liao, Chih-Wei Liu, Yu Min Hsu, Ting Shien Duh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The verified applicability of proton-beam treatment (so-called, "π technology") in both the device isolation and the inductor Q-improvement on Si substrates is now enticing some big chipmakers into realizing a VLSI back-end facility: the particle-beam stand (PBS). Potentially, the PBS can end the traditionally laborious mixed-mode product development cycle and eventually become the general SOC integration platform. Recently, however, there are several puzzles encountered in the proton-enhanced inductors. Among others, there are explosive rise of inductance near certain frequency in some cases but not in others, and the inductor size effect that dubiously alters the frequency at which the above anomaly takes place. Such difficulties seem to go beyond the current understanding of the microstrip inductors. A new theory is briefly presented here to address the possible cause of such puzzles.

Original languageEnglish
Title of host publication2002 Semiconductor Manufacturing Technology Workshop, SMTW 2002
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages198-203
Number of pages6
ISBN (Electronic)0780376048, 9780780376045
DOIs
StatePublished - 1 Jan 2002
EventSemiconductor Manufacturing Technology Workshop, SMTW 2002 - Hsinchu, Taiwan
Duration: 10 Dec 200211 Dec 2002

Publication series

Name2002 Semiconductor Manufacturing Technology Workshop, SMTW 2002

Conference

ConferenceSemiconductor Manufacturing Technology Workshop, SMTW 2002
CountryTaiwan
CityHsinchu
Period10/12/0211/12/02

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    Liao, C., Liu, C-W., Hsu, Y. M., & Duh, T. S. (2002). A theory for anomalous spectral behaviors observed in proton-enhanced microstrip inductors on silicon with its brief derivation. In 2002 Semiconductor Manufacturing Technology Workshop, SMTW 2002 (pp. 198-203). [1197414] (2002 Semiconductor Manufacturing Technology Workshop, SMTW 2002). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMTW.2002.1197414