A study of the threshold voltage variations for ultrathin body double gate SOI MOSFETs

Chien Shao Tang*, Shih Ching Lo, Jam Wem Lee, Jyun Hwei Tsai, Yi-Ming Li

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Silicon on insulator (SOI) devices have been of great interest in these years. In this paper, simulation with density-gradient transport model is performed to examine the variation of threshold voltage (VTH) for double gate SOI MOSFETs. Different thickness of silicon (Si) film, oxide thickness, channel length and doping concentration are considered in this work. According to the numerical study, both drift-diffusion (DD) and density gradient (DG) models demonstrate that the thickness of Si film greatly affects the threshold voltage (5 - 15 % variation). It is found that the thickness of Si film decreases, VTH variation increases; and the dependence relation is nonlinear. Therefore, this effect must be taken into account for the realization of double gate SOI ULSI circuit.

Original languageEnglish
Title of host publication2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
EditorsM. Laudon, B. Romanowicz
Pages145-148
Number of pages4
StatePublished - 2004
Event2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 - Boston, MA, United States
Duration: 7 Mar 200411 Mar 2004

Publication series

Name2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
Volume3

Conference

Conference2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
CountryUnited States
CityBoston, MA
Period7/03/0411/03/04

Keywords

  • Double-gate devices
  • Modeling and simulation
  • Quantum mechanical effects
  • Threshold voltage
  • Ultrathin body

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    Tang, C. S., Lo, S. C., Lee, J. W., Tsai, J. H., & Li, Y-M. (2004). A study of the threshold voltage variations for ultrathin body double gate SOI MOSFETs. In M. Laudon, & B. Romanowicz (Eds.), 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 (pp. 145-148). (2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004; Vol. 3).