A SOM-FBPN-ensemble approach with error feedback to adjust classification for wafer-lot completion time prediction

Tin-Chih Chen*

*Corresponding author for this work

Research output: Contribution to journalArticle

48 Scopus citations

Abstract

Predicting the completion time of a lot is a critical task to a wafer fabrication plant (wafer fab). Many recent studies have shown that pre-classifying a wafer lot before predicting the completion time was beneficial to prediction accuracy. However, most classification approaches applied in this field could not absolutely classify wafer lots. Besides, whether the pre-classification approach combined with the subsequent prediction approach was suitable for the data was questionable. For tackling these two problems, a self-organization map-fuzzy-back-propagation network-ensemble (SOM-FBPN-ensemble) approach with error feedback to adjust classification is proposed in this study. The proposed methodology has two advanced features: predicting the completion time using a FBPN-ensemble instead of a single FBPN, and feeding back the prediction error to adjust the classification result by the SOM. According to experimental results, the prediction accuracy of the proposed approach was significantly better than those of many existing approaches. Besides, the effects of the two advanced features were also evident.

Original languageEnglish
Pages (from-to)782-792
Number of pages11
JournalInternational Journal of Advanced Manufacturing Technology
Volume37
Issue number7-8
DOIs
StatePublished - 1 Jun 2008

Keywords

  • Completion time prediction
  • Ensemble
  • Error feedback
  • Fuzzy back propagation network
  • Self-organization map
  • Wafer fab

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