A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling

Bruce C.S. Chou*, Yeong Maw Chen, Yang-Mang Ou, Jin Shown Shie

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

44 Scopus citations

Abstract

A sensitive micro-Pirani vacuum sensor has been fabricated. With effective schemes of ambient-temperature compensation and stabilization, it is capable of measuring vacuum pressure linearly from 1 torr down to 10-7 torr, a three orders-of-magnitude improvement in resolution over conventional gauges. A special electrothermal SPICE model, complementary to the conventional analog representation of thermal parameters, is also proposed. It allows a high-level sensor-circuit integrated simulation based on the most fundamental principle and thermal variables. Good agreement between the measured data obtained from a constant-temperature readout circuit and the simulation result is demonstrated.

Original languageEnglish
Pages (from-to)273-277
Number of pages5
JournalSensors and Actuators, A: Physical
Volume53
Issue number1-3
DOIs
StatePublished - 1 Jan 1996

Keywords

  • Constant-temperature circuits
  • Electrothermal SPICE
  • Pirani microsensors
  • Temperature compensation

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