A Robust fully-integrated digital-output inductive CMOS-MEMS accelerometer with improved inductor quality factor

Yi Chiu*, Hsuan Wu Liu, Hao Chiao Hong

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'A Robust fully-integrated digital-output inductive CMOS-MEMS accelerometer with improved inductor quality factor'. Together they form a unique fingerprint.

Engineering & Materials Science