A precise pH microsensor using RF-sputtering IrO 2 and Ta 2 O 5 films on Pt-electrode

Li Min Kuo*, Yi-Chia Chou, Kuan-Neng Chen, Chien Chia Lu, Shuchi Chao

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

19 Scopus citations


In this study, an easily implemented surface modification scheme is reported employing Ta 2 O 5 membrane which covers IrO 2 electrode in response to H + and eliminating redox species interference. Evidence shows that H + can pass through Ta 2 O 5 films and react with IrO 2 /Pt electrodes due to proton-electron double injection. A Ta 2 O 5 membrane, an ionic conductor with an insulating property, blocks the transport of electrons generated from oxygen perturbation in the solution. The conduction of both electrons and protons preserve the current continuity across the interface. Owing to proton-electron double injection, IrO 2 will be reduced to Ir(OH) 3 during pH detection. The [IrO 2 ]/[Ir(OH) 3 ] will remain constant and therefore the Nernstian electrode potential performs stably as a function of pH (-59.447 to -59.504 mV/pH, 2 < pH <13). In addition, the proposed pH microsensor displayed high ion selectivity with respect to K + , Na + , and Li + , with log K H,M values (∼-12.4) and has a working lifetime over one week.

Original languageEnglish
Pages (from-to)687-691
Number of pages5
JournalSensors and Actuators, B: Chemical
StatePublished - 31 Mar 2014


  • IrO
  • pH sensor
  • Proton-electron double injection
  • Solid-state sensor
  • Ta O

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