A piezoelectric two-degree-of-freedom nanostepping motor with parallel design

Chiao Hua Cheng, Shao-Kang Hung

Research output: Contribution to journalArticle

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This letter proposes a parallel design for a piezoelectric two-degree-of-freedom nanostepping motor, which performs translation or rotation while its two piezoelectric elements are driven in-phase or out-of-phase electrically. Compared to serial mechanism, parallel designs are more compact, stiffer, and have better dynamical characteristics. Experimental results show that this device works stably. The stepping resolution/stroke values of translation and rotation are 100 nm/6 mm and 0.04°/infinite, respectively.

Original languageEnglish
Article number7332753
Pages (from-to)2197-2199
Number of pages3
JournalIEEE/ASME Transactions on Mechatronics
Issue number4
StatePublished - 1 Aug 2016


  • Inertia motor
  • nanopositioner
  • piezoelectric element
  • stepping motor
  • stick-slip

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