A novel suspension design for MEMS sensing device to eliminate planar spring constants mismatch

Kai Yu Jiang*, He Ling Chen, Wen-Syang Hsu, Yueh Kang Lee, Yen Wu Miao, Yi Chueh Shieh, Chen Yuan Hung

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

This paper presents a new suspension design for planar MEMS sensing devices. The new design includes four coil springs which are symmetrically arranged with respect to the center of the proof mass with 90-degree orientation difference. The proposed coil spring design is found to take less area to achieve similar spring constant than the conventional serpentine spring design. Furthermore, the proposed symmetrical-to-center arrangement on suspension can reduce spring constants mismatch between X and Y axes, even under beam width deviation due to fabrication resolution. This concept is realized and verified by experimental results from two-axis capacitive accelerometers through a polysilicon-based CMOS fabrication platform.

Original languageEnglish
Title of host publicationIEEE SENSORS 2012 - Proceedings
DOIs
StatePublished - 1 Dec 2012
Event11th IEEE SENSORS 2012 Conference - Taipei, Taiwan
Duration: 28 Oct 201231 Oct 2012

Publication series

NameProceedings of IEEE Sensors

Conference

Conference11th IEEE SENSORS 2012 Conference
CountryTaiwan
CityTaipei
Period28/10/1231/10/12

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