A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism

Sheng-Chieh Huang*, Shao-Kang Hung, Mei Yung Chen, Chih Hsien Lin, Li Chen Fu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper, we present a novel mechanism and system implementation of six degree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3mm×3mm×4mm with a positioning resolution of±10μm, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.

Original languageEnglish
Title of host publicationProceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
Pages822-827
Number of pages6
DOIs
StatePublished - 1 Dec 2007
Event33rd Annual Conference of the IEEE Industrial Electronics Society, IECON - Taipei, Taiwan
Duration: 5 Nov 20078 Nov 2007

Publication series

NameIECON Proceedings (Industrial Electronics Conference)

Conference

Conference33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
CountryTaiwan
CityTaipei
Period5/11/078/11/07

Keywords

  • Hybrid magnetic and fluid mechanism
  • Positioner
  • Precision motion control

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