A novel self-powered piezoelectric three-axis MEMS magnetic sensor

Po Chen Yeh, Hao Duan, Tien-Kan Chung*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

This paper demonstrates a self-powered piezoelectric three-axis MEMS magnetic sensor. The sensor consists of a silicon diaphragm, a PZT thin film with Pt top and bottom electrodes, and two patterned Ni thick films. When three-axial magnetic fields are applied to the sensor, alternating magnetic forces/torques are induced in two Ni films and consequently corresponding deformation/bending are produced in the diaphragm structure. The deformation/bending of the diaphragm generate the strains in the PZT thin film and thus produce corresponding different piezoelectric voltage responses. The testing results show the sensor successfully senses three-axial magnetic fields and has a decent linearity in the range of 5-70 Gauss.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1021-1024
Number of pages4
ISBN (Electronic)9781538627310
DOIs
StatePublished - 26 Jul 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan
Duration: 18 Jun 201722 Jun 2017

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan
CityKaohsiung
Period18/06/1722/06/17

Keywords

  • magnetic sensor
  • MEMS
  • Piezoelectric
  • three-axis

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