A novel selective Ni3Si contact plug technique for deep-submicron ULSIs

T. Lijima, A. Nishiyama, Y. Ushiku, T. Ohguro, I. Kunishima, K. Suguro, H. Iwai

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Scopus citations
Original languageEnglish
Title of host publication1992 Symposium on VLSI Technology - Digest of Technical Papers, VLSI Technology 1992
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages70-71
Number of pages2
ISBN (Electronic)0780306988
DOIs
StatePublished - 1992
Event1992 Symposium on VLSI Technology - Digest of Technical Papers, VLSI Technology 1992 - Seattle, United States
Duration: 2 Jun 19924 Jun 1992

Publication series

NameDigest of Technical Papers - Symposium on VLSI Technology
Volume1992-June
ISSN (Print)0743-1562

Conference

Conference1992 Symposium on VLSI Technology - Digest of Technical Papers, VLSI Technology 1992
CountryUnited States
CitySeattle
Period2/06/924/06/92

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