A Novel MEMS DC Magnetic Sensor Using Thermomagnetic-Piezoelectric Materials with a Coil-Less Reset Approach

Chin Chung Chen, I. Lun Chen, Hao Duan, Tien-Kan Chung*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We report a novel MEMS DC magnetic sensor using thermomagnetic-piezoelectric materials with a coil-less magnetization-reset approach. The magnetic sensor consists of a silicon MEMS diaphragm, a piezoelectric PZT thin film, and a thermomagnetic Gadolinium (Gd) sheet. Due to the Gd's thermomagnetic property, the sensor at low temperature (for instant, 9 °C.; below its Curie temperature which is in room temperature range) can sense ambient DC magnetic fields. Without using on-chip coils, the sensor can be easily reset by heating the sensor higher than its Curie temperature (for example, 45°C). According to experimental results, the sensor successfully senses DC magnetic field from 2 to 100 Gauss and is reset at 45 °C. When comparing to conventional NEMS, MEMS, and AMR magnetic sensors (i.e., using magnetic materials requiring on-chip magnetization-reset coils which occupy huge chip footprint), our sensor with the coil-less reset approach can significantly reduce the sensor footprint.

Original languageEnglish
Title of host publicationNEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages131-134
Number of pages4
ISBN (Electronic)9781538652732
DOIs
StatePublished - 3 Dec 2018
Event13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018 - Singapore, Singapore
Duration: 22 Apr 201826 Apr 2018

Publication series

NameNEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018
CountrySingapore
CitySingapore
Period22/04/1826/04/18

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