A novel high-performance poly-silicon thin film transistor with a self-aligned thicker sub-gate oxide near the drain/source regions

Kow-Ming Chang, Hung Chung Yuan Hung Chung, Ming Lin Gin Ming Lin, Hong Lin Jian Hong Lin, Gun Deng Chi Gun Deng

Research output: Contribution to journalArticle

10 Scopus citations

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Chemical Compounds

Engineering & Materials Science