A novel fabrication method of microlens array by surface tension and injection process

Yu Hsin Lin*, Wen-Syang Hsu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

A novel and simple method on fabricating Ultra-Violet curable polymer microlens array on silicon membrane and cantilever by injection process is presented. The radius of curvature of microlens can be tuned by liquid polymer surface tension and applied pressure. The polymer microlens array, with a diameter of 17μ m, a pitch of 30 μ m on silicon membrane and cantilever are successfully fabricated to demonstrate the feasibility of the proposed method. Also, it is shown that different curvature radius of microlens can be fabricated, and the proposed method has potential to integrate with other optical device.

Original languageEnglish
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages443-446
Number of pages4
DOIs
StatePublished - 28 Aug 2007
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: 16 Jan 200719 Jan 2007

Publication series

NameProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Conference

Conference2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
CountryThailand
CityBangkok
Period16/01/0719/01/07

Keywords

  • Injection
  • Optical device
  • Polymer microlens
  • Surface tension

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