A novel array-based test methodology for local process variation monitoring

Tseng Chin Luo*, Chia-Tso Chao, Michael S.Y. Wu, Kuo Tsai Li, Chin C. Hsia, Huan Chi Tseng, Chuen Uan Huang, Yuan Yao Chang, Samuel C. Pan, Konrad K.L. Young

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

As process technologies continually advance, local process variation has greatly increased and gradually become one of the most critical factors for IC manufacturing. To monitor local process variation, a large number of DUTs (deviceunder- test) in close proximity must be measured. In this paper, we presents a novel array-based test structure to characterize local process variation with limited area overhead. The proposed test structure can guarantee high measurement accuracy by utilizing the proposed hardware IR compensation and voltage bias elevation. Furthermore, the DUT layout need not be modified for the proposed test structure so that the measured variation exactly reflects the reality in the manufacturing environment. The measured results from the few most advanced process-technology nodes demonstrate the effectiveness and efficiency of the proposed test structure in quantifying local process variation.

Original languageEnglish
Title of host publicationInternational Test Conference, ITC 2009 - Proceedings
DOIs
StatePublished - 15 Dec 2009
EventInternational Test Conference, ITC 2009 - Austin, TX, United States
Duration: 1 Nov 20096 Nov 2009

Publication series

NameProceedings - International Test Conference
ISSN (Print)1089-3539

Conference

ConferenceInternational Test Conference, ITC 2009
CountryUnited States
CityAustin, TX
Period1/11/096/11/09

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    Luo, T. C., Chao, C-T., Wu, M. S. Y., Li, K. T., Hsia, C. C., Tseng, H. C., Huang, C. U., Chang, Y. Y., Pan, S. C., & Young, K. K. L. (2009). A novel array-based test methodology for local process variation monitoring. In International Test Conference, ITC 2009 - Proceedings [5355656] (Proceedings - International Test Conference). https://doi.org/10.1109/TEST.2009.5355656