A new mechanism design of electro-magnetic actuator for a micro-positioner

Mei Yung Chen*, Huan Wen Tzeng, Shao-Kang Hung

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

This paper proposes a new type of non-conventional electro-magnetic actuator (EMA) for micro-positioning. It is a repulsive magnetic system consisting of a motion pad and two active coils. The motion of the pad is caused by the repelling force between the coils and the permanent magnets on the pad. First, the dynamic model is derived and analyzed. Next, an adaptive sliding mode controller is developed to deal with the unknown parameters with the objective of precision positioning. The experimental results demonstrate satisfactory performances including regulation accuracy and control stiffness for the system.

Original languageEnglish
Pages (from-to)41-48
Number of pages8
JournalISA Transactions
Volume46
Issue number1
DOIs
StatePublished - 1 Jan 2007

Keywords

  • Adaptive sliding mode control
  • Dual coil
  • Electro-magnetic actuator
  • Permanent magnet
  • Precision positioning

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