A new approach for characterizing structure-dependent hot-carrier effects in drain-engineered MOSFET's

Steve S. Chung*, Jiuun Jer Yang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

In this paper, we have demonstrated successfully a new approach for evaluating the hot-carrier reliability in submicron LDD MOSFET with various drain engineering. It was developed based on an efficient charge pumping measurement technique along with a new criterion. This new criterion is based on an understanding of the interface state (Nit) distribution, instead of substrate current or impact ionization rate, for evaluating the hot-carrier reliability of drain-engineered devices. The position of the peak Nit distribution as well as the electric field distribution is critical to the device hot-carrier reliability. From the characterized Nit spatial distribution, we found that the shape of the interface state distribution is similar to that of the electric field. Also, to suppress the spacer-induced degradation, we should keep the peak values of interface state away from the spacer region. In our studied example, for conventional LDD device, sidewall spacer is the dominant damaged region since the interface state in this region causes an additional series resistance which leads to drain current degradation. LATID device can effectively reduce hot-carrier effect since most of the interface states are generated away from the gate edge toward the channel region such that the spacer-induced resistance effect is weaker than that of LDD devices.

Original languageEnglish
Pages (from-to)1371-1377
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume46
Issue number7
DOIs
StatePublished - 1 Jan 1999

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