Torsion micromirror devices that can achieve linear stepping angle effects play an important role in optical MEMS' applications. However, traditional torsion micromirror devices driven by a single electrostatic electrode have difficulty meeting this requirement due to their nonlinear angle-voltage transfer characteristics. In this regard, the concept of a multiple-electrode-controlled micromirror is proposed to eliminate this drawback. Through this novel design, linear stepping angles can be easily achieved by a set of linearly varied or constantly applied voltages. A simple mathematical model has been developed to predict the angle-voltage transfer characteristics of the proposed device and has been simulated with finite element simulations. The corresponding control strategies of this device, named the linear control strategy and the digital control strategy, are also proposed in this paper. The Cronos/MEMSCAP Multi-User MEMS Process (MUMPs) was used in conjunction with flip-chip bonding technology to fabricate the proposed torsion micromirror device. Experimental data indicates that the relative stepping angle error, between the fabricated device and the mathematical model, are within 5%.
- Flip-chip bonding
- Microelectromechanical systems (MEMS)
- Multi-user MEMS process (MUMPs)
- Multiple electrodes