A monolithic CMOS/MEMS accelerometer with zero-g calibration readout circuit

Yu Sian Liu, Chien Jo Huang, Fu Yen Kuo, Kuei-Ann Wen, Long Sheng Fan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

A monolithic accelerometer design with zero-g calibration with TSMC 0.18 μm mixed-signal 1P6M process is presented. On-chip digital offset calibration enables compensation of random mechanical offset in the sensor due to process variation. The maximum 21 fF capacitance mismatch can be calibrated. The simulation results show that the whole system have 452.1 mV/g sensitivity. The power consumption is about 1.16 mW. The output noise is 26.85 μg/√Hz at 1KHz.

Original languageEnglish
Title of host publicationIEEE EuroCon 2013
Pages2106-2110
Number of pages5
DOIs
StatePublished - 4 Dec 2013
EventIEEE EuroCon 2013 - Zagreb, Croatia
Duration: 1 Jul 20134 Jul 2013

Publication series

NameIEEE EuroCon 2013

Conference

ConferenceIEEE EuroCon 2013
CountryCroatia
CityZagreb
Period1/07/134/07/13

Keywords

  • Accelerometer capacitive readout
  • Offset calibration
  • Readout circuit
  • Zero-g calibration

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