A monolithic CMOS MEMS accelerometer with low noise gain tunable interface in 0.18μm CMOS MEMS technology

Yi Da Lin, Jian Yuan Lin, Chun Kai Wang*, Long Sheng Fan, Kuei-Ann Wen

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

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Engineering & Materials Science