A micromirror with large static rotation and vertical actuation

Jin-Chern Chiou*, Chin Fu Kou, Yung Jiun Lin

*Corresponding author for this work

Research output: Contribution to journalArticle

20 Scopus citations

Abstract

A micromirror with large rotation angle and vertical displacement is proposed and developed. The proposed micromirror is actuated by newly developed prestress comb drive actuators, which exhibit no pull-in, no hysteresis, and large vertical displacement range characteristics. The micromirror was fabricated using commercially available PolyMUMPs. Experimental results indicated that the maximum rotation angle and vertical displacement of the device are 26 and 45μm, respectively.

Original languageEnglish
Pages (from-to)297-302
Number of pages6
JournalIEEE Journal on Selected Topics in Quantum Electronics
Volume13
Issue number2
DOIs
StatePublished - 1 Mar 2007

Keywords

  • Microelectromechanical systems (MEMS)
  • Micromirror
  • Microoptoelectromechanical systems (MOEMS)
  • Pre-stress comb drive actuator (PCA)

Fingerprint Dive into the research topics of 'A micromirror with large static rotation and vertical actuation'. Together they form a unique fingerprint.

  • Cite this