A micromirror with large rotation angle and vertical displacement is proposed and developed. The proposed micromirror is actuated by newly developed prestress comb drive actuators, which exhibit no pull-in, no hysteresis, and large vertical displacement range characteristics. The micromirror was fabricated using commercially available PolyMUMPs. Experimental results indicated that the maximum rotation angle and vertical displacement of the device are 26 and 45μm, respectively.
|Number of pages||6|
|Journal||IEEE Journal on Selected Topics in Quantum Electronics|
|State||Published - 1 Mar 2007|
- Microelectromechanical systems (MEMS)
- Microoptoelectromechanical systems (MOEMS)
- Pre-stress comb drive actuator (PCA)