A method to fabricate 2D nanoparticle arrays

C. H. Lin, L. Jiang, Y. H. Chai, H. Xiao, Shean-Jen Chen, H. L. Tsai

Research output: Contribution to journalArticlepeer-review

19 Scopus citations


This article demonstrates an efficient approach to fabricate nanoparticles arranged in a periodic pattern over a large area. A nanoscale gold film coated on a silicon wafer substrate was sectioned into grids by focused ion beam machining. Through a thermal treatment, the film in a confined area transforms into a nanoparticle due to the surface tension effect of the melted gold film. By controlling the film thickness and the size of the confined area, a nanoparticle array with various particle sizes and interparticle spacings can be manipulated. This approach may have great potential applications in sensor chips and nonlinear devices.

Original languageEnglish
Pages (from-to)855-860
Number of pages6
JournalApplied Physics A: Materials Science and Processing
Issue number4
StatePublished - 1 Mar 2010

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