A low-stress trench isolation structure and its electrical characteristics of sub 20 ps high-speed ECL

S. Matsuda, N. Itoh, H. Nakajima, K. Inou, T. Iinuma, C. Yoshino, Y. Tsuboi, Y. Katsumata, H. Iwai, H. Hara

Research output: Contribution to journalConference article

Original languageEnglish
Article number760251
Pages (from-to)73-74
Number of pages2
JournalDigest of Technical Papers - Symposium on VLSI Technology
DOIs
StatePublished - 1993
Event1993 13th Symposium on VLSI Technology, VLSIT 1993 - Kyoto, Japan
Duration: 17 May 199319 May 1993

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