A low power reconfigurable SAR ADC for CMOS MEMS sensor

Hao Min Lin, Kuei-Ann Wen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

This paper presents a reconfigurable successive approximation register (SAR) Analog-to-Digital Converter (ADC) of which the resolution can be scaled from 9 to 12 bits for various inertial MEMS sensor applications. The dual supply voltage skill separating digital and analog voltage is implemented for achieving low power consumption. In addition, level shifter connects the interface between digital and analog domain. 3 bit segmented capacitor array are used to decrease the static error and glitches from MSB switching. In the provided 9 to 12 bits mode, this structure consumes 2.5, 2.8, 3.9 and 9.7 μW and achieve 52.3, 57.7, 63.2 and 68.6 SNDR respectively, resulting in figure of merit (FoM) 148, 88.8, 66.3 and 88.4fJ/conversion-step.

Original languageEnglish
Title of host publicationProceedings - International SoC Design Conference 2017, ISOCC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages7-8
Number of pages2
ISBN (Electronic)9781538622858
DOIs
StatePublished - 29 May 2018
Event14th International SoC Design Conference, ISOCC 2017 - Seoul, Korea, Republic of
Duration: 5 Nov 20178 Nov 2017

Publication series

NameProceedings - International SoC Design Conference 2017, ISOCC 2017

Conference

Conference14th International SoC Design Conference, ISOCC 2017
CountryKorea, Republic of
CitySeoul
Period5/11/178/11/17

Keywords

  • Dual voltage
  • MEMS sensor
  • SAR ADC
  • Scaled resolution
  • Segmented capacitor array

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