A hybrid intelligent approach for output projection in a semiconductor fabrication plant

Tin-Chih Chen; Yi Chi Wang

doi:10.3233/IDA-2008-12108

A hybrid intelligent approach for output projection in a semiconductor fabrication plant

Tin-Chih Chen^*, Yi Chi Wang

^*Corresponding author for this work

Department of Industrial Engineering and Management

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A hybrid intelligent approach is proposed which can be used to estimate the output of each product type in a semiconductor fabrication plant. This is a critical task for plant operation. First, the hybrid fuzzy-c-means (FCM) and fuzzy-back-propagation-neural-network (FBPN) approach is applied to estimate the output time for every job in the plant. Subsequently, the fuzzy output projection function (FOPF) is proposed to project the outputs into each future time period. To evaluate the advantages and/or disadvantages of the hybrid intelligent approach, a simulated semiconductor plant model is also used in this study to generate test data. From the experimental results, the output projection accuracy by the hybrid intelligent approach was significantly better than that of some existing approaches.

Original language	English
Pages (from-to)	129-144
Number of pages	16
Journal	Intelligent Data Analysis
Volume	12
Issue number	1
DOIs	https://doi.org/10.3233/IDA-2008-12108
State	Published - 22 Sep 2008

Keywords

Fuzzy back propagation neural network
Fuzzy c-means
Fuzzy neural network
Output projection
Semiconductor fabrication

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abstract = "A hybrid intelligent approach is proposed which can be used to estimate the output of each product type in a semiconductor fabrication plant. This is a critical task for plant operation. First, the hybrid fuzzy-c-means (FCM) and fuzzy-back-propagation-neural-network (FBPN) approach is applied to estimate the output time for every job in the plant. Subsequently, the fuzzy output projection function (FOPF) is proposed to project the outputs into each future time period. To evaluate the advantages and/or disadvantages of the hybrid intelligent approach, a simulated semiconductor plant model is also used in this study to generate test data. From the experimental results, the output projection accuracy by the hybrid intelligent approach was significantly better than that of some existing approaches.",

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