A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers

Wen Chien Chen*, Che Sheng Chen, Kuei-Ann Wen, Long Sheng Fan, Weileun Fang, Sheng Shian Li

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations

Abstract

A generalized foundry CMOS-MEMS platform suited for integrated micromechanical resonator circuits have been developed for commercial multi-user purpose and demonstrated with a fast turnaround time and a variety of design flexibilities for resonator applications. With this platform, different configurations of capacitively-transduced resonators monolithically integrated with their associated amplifier circuits, spanning frequencies from 500kHz to 14.5MHz, have been realized with resonator Q's around 2,000. This platform specifically featured with various configurations of structural materials, different arrangements of mechanical boundary conditions, large transduction area, well-defined anchors, and performance enhancement scaling with IC fabrication technology, offers a variety of flexible design options suited for sensor and RF applications.

Original languageEnglish
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages204-207
Number of pages4
DOIs
StatePublished - 1 Jun 2010
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: 24 Jan 201028 Jan 2010

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CountryChina
CityHong Kong
Period24/01/1028/01/10

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    Chen, W. C., Chen, C. S., Wen, K-A., Fan, L. S., Fang, W., & Li, S. S. (2010). A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 204-207). [5442531] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442531