A gasket-type standard leak element using femtosecond laser micromachining

Chi-Hin Chan*, Chien-Ming Tu, S. D. Yeh, C. C. Chang, T. C. Lin, Chih-Wei Luo, Ching-Shiang Hwang

*Corresponding author for this work

Research output: Contribution to journalArticle

Abstract

A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (

Original languageEnglish
Article number109650
Number of pages6
JournalVacuum
Volume180
DOIs
StatePublished - Oct 2020

Keywords

  • Leak element
  • Femtosecond laser ablation
  • Molecular flow conductance
  • Microfluidic
  • IN-SITU CALIBRATION
  • IONIZATION GAUGES
  • SENSITIVITIES
  • HOLES

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