A fuzzy collaborative sensor network for semiconductor manufacturing cycle time forecasting

Yu Cheng Lin, Tin-Chih Chen*, Yu Cheng Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

Network based sensing has become an important field of research, and it is expected that new applications of remote sensing will be developed. A fuzzy collaborative sensor network is developed in this study to predict the cycle time of a job in a semiconductor manufacturing factory, which is an important task for the factory. In the fuzzy collaborative sensor network, each sensor detects the status of a particular job as well as various environmental conditions present in the factory and uses a fuzzy neural network to analyze the received information. Each sensor communicates its settings and forecasting results to other sensors with the aid of a central control unit. According to the experimental results, the aggregate forecasting performance was considerably improved through the sensors' collaboration.

Original languageEnglish
Article number257276
JournalInternational Journal of Distributed Sensor Networks
Volume2013
DOIs
StatePublished - 13 May 2013

Fingerprint Dive into the research topics of 'A fuzzy collaborative sensor network for semiconductor manufacturing cycle time forecasting'. Together they form a unique fingerprint.

Cite this