A distributed simulation-based computational intelligence algorithm for nanoscale semiconductor device inverse problem

Yiming Li, G. Kai Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a distributed simulation-based computational intelligence algorithm for inverse problem of nanoscale semiconductor device is presented. This approach features a simulation-based optimization strategy, and mainly integrates the semiconductor process simulation, semiconductor device simulation, evolutionary strategy, and empirical knowledge on a distributed computing environment. For a set of given target current-voltage (I-V) curves of metal-oxide-semiconductor field effect transistors (MOSFETs) devices, the developed prototype executes evolutionary tasks to solve an inverse doping profile problem, and therefore optimize fabrication recipes. In the evolutionary loop, the established management server allocates the jobs of process simulation and device simulation on a PC-based Linux cluster with message passing interface (MPI) libraries. Good benchmark results including the speed-up, the load balancing, and the parallel efficiency are presented. Computed results, compared with the realistic measured data of 65 nm n-type MOSFET, show the accuracy and robustness of the method.

Original languageEnglish
Title of host publicationFrontiers of High Performance Computing and Networking - ISPA 2006 International Workshops, FHPCN, XHPC, S-GRACE, GridGIS, HPC-GTP, PDCE, ParDMCom, WOMP, ISDF, and UPWN, Proceedings
Pages231-240
Number of pages10
DOIs
StatePublished - 2006
EventInt. Workshops on FHPCN 2006, XHPC 2006, S-GRACE 2006, GridGIS 2006, HPC-GTP 2006, PDCE 2006, ParDMCom 2006, WOMP 2006, ISDF 2006, and UPWN 2006, Held in Conjunction with the 4th Int. Symp. on Parallel and Distributed Processing and Appl., SPA 2006 - Sorrento, Italy
Duration: 4 Dec 20067 Dec 2006

Publication series

NameLecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
Volume4331 LNCS
ISSN (Print)0302-9743
ISSN (Electronic)1611-3349

Conference

ConferenceInt. Workshops on FHPCN 2006, XHPC 2006, S-GRACE 2006, GridGIS 2006, HPC-GTP 2006, PDCE 2006, ParDMCom 2006, WOMP 2006, ISDF 2006, and UPWN 2006, Held in Conjunction with the 4th Int. Symp. on Parallel and Distributed Processing and Appl., SPA 2006
CountryItaly
CitySorrento
Period4/12/067/12/06

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    Li, Y., & Chen, G. K. (2006). A distributed simulation-based computational intelligence algorithm for nanoscale semiconductor device inverse problem. In Frontiers of High Performance Computing and Networking - ISPA 2006 International Workshops, FHPCN, XHPC, S-GRACE, GridGIS, HPC-GTP, PDCE, ParDMCom, WOMP, ISDF, and UPWN, Proceedings (pp. 231-240). (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); Vol. 4331 LNCS). https://doi.org/10.1007/11942634_25