TY - GEN
T1 - A distributed simulation-based computational intelligence algorithm for nanoscale semiconductor device inverse problem
AU - Li, Yiming
AU - Chen, G. Kai
PY - 2006
Y1 - 2006
N2 - In this paper, a distributed simulation-based computational intelligence algorithm for inverse problem of nanoscale semiconductor device is presented. This approach features a simulation-based optimization strategy, and mainly integrates the semiconductor process simulation, semiconductor device simulation, evolutionary strategy, and empirical knowledge on a distributed computing environment. For a set of given target current-voltage (I-V) curves of metal-oxide-semiconductor field effect transistors (MOSFETs) devices, the developed prototype executes evolutionary tasks to solve an inverse doping profile problem, and therefore optimize fabrication recipes. In the evolutionary loop, the established management server allocates the jobs of process simulation and device simulation on a PC-based Linux cluster with message passing interface (MPI) libraries. Good benchmark results including the speed-up, the load balancing, and the parallel efficiency are presented. Computed results, compared with the realistic measured data of 65 nm n-type MOSFET, show the accuracy and robustness of the method.
AB - In this paper, a distributed simulation-based computational intelligence algorithm for inverse problem of nanoscale semiconductor device is presented. This approach features a simulation-based optimization strategy, and mainly integrates the semiconductor process simulation, semiconductor device simulation, evolutionary strategy, and empirical knowledge on a distributed computing environment. For a set of given target current-voltage (I-V) curves of metal-oxide-semiconductor field effect transistors (MOSFETs) devices, the developed prototype executes evolutionary tasks to solve an inverse doping profile problem, and therefore optimize fabrication recipes. In the evolutionary loop, the established management server allocates the jobs of process simulation and device simulation on a PC-based Linux cluster with message passing interface (MPI) libraries. Good benchmark results including the speed-up, the load balancing, and the parallel efficiency are presented. Computed results, compared with the realistic measured data of 65 nm n-type MOSFET, show the accuracy and robustness of the method.
UR - http://www.scopus.com/inward/record.url?scp=84883892957&partnerID=8YFLogxK
U2 - 10.1007/11942634_25
DO - 10.1007/11942634_25
M3 - Conference contribution
AN - SCOPUS:84883892957
SN - 3540498605
SN - 9783540498605
T3 - Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
SP - 231
EP - 240
BT - Frontiers of High Performance Computing and Networking - ISPA 2006 International Workshops, FHPCN, XHPC, S-GRACE, GridGIS, HPC-GTP, PDCE, ParDMCom, WOMP, ISDF, and UPWN, Proceedings
Y2 - 4 December 2006 through 7 December 2006
ER -