A decouple structured gyroscope with integrated readout circuit on standard 0.18jim 1P6M CMOS Technolo

Chun Lin Chien, Kuei-Ann Wen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A dual proof-mass structured gyroscope integrated with readout circuit have been proposed. The C to V stage is achieved by the differential difference amplifier (DDA) which has advantages of high gain, low temperature and process dependence. Chopper Stabilization (CHS) and Corrected Double Sampling (CDS) Ls used to suppress low-frequency noise and compensate DC offset. The gain of DDA is 25dB and power consumption of total readout circuit is 791μW. The mems part is fabricated with standard 1P6M 0.18um CMOS process and the mechanical sensitivity is 11.26aF/°/s. Chip area is 1.9xl.7mm2.

Original languageEnglish
Title of host publicationISOCC 2016 - International SoC Design Conference
Subtitle of host publicationSmart SoC for Intelligent Things
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages15-16
Number of pages2
ISBN (Electronic)9781467393089
DOIs
StatePublished - 27 Dec 2016
Event13th International SoC Design Conference, ISOCC 2016 - Jeju, Korea, Republic of
Duration: 23 Oct 201626 Oct 2016

Publication series

NameISOCC 2016 - International SoC Design Conference: Smart SoC for Intelligent Things

Conference

Conference13th International SoC Design Conference, ISOCC 2016
CountryKorea, Republic of
CityJeju
Period23/10/1626/10/16

Keywords

  • Capacithe sensing
  • CMOS-MEMS
  • Gyroscope
  • Readout circuit

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